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CUBIC: laboratory testing of 'thin poly' CCDs

机译:CUBIC:“薄聚” CCD的实验室测试

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Abstract: CUBIC, the Cosmic Unresolved X-ray Background Instrument Using CCDs, is designed to make moderate resolution X-ray spectral measurements at spatial scales of a few degrees. While the energy range is nominally 200 eV - 10 keV, the CCDs have been designed to maximize the soft X-ray performance by using novel structures. The CUBIC CCDs, fabricated by Loral Fairchild, are 1024 $MUL 1024 pixels in size, with 18 $mu@m $MUL 18 $mu@m pixels. The CCDs use a new `thin poly' gate structure designed to maximize low energy quantum efficiency, while still retaining the advantages of front-side illumination and the high Charge Transfer Efficiency of a three-phase device. Being front-side illuminated, the design avoids the surface stability problems of backside illuminated devices. Fabrication of the first lot of CCDs and test structures has been completed, and we report laboratory camera testing of the CCDs at Penn State.!7
机译:摘要:CUBIC是使用CCD的宇宙未解析X射线背景仪器,旨在在几度的空间尺度上进行中等分辨率的X射线光谱测量。虽然能量范围标称值为200 eV-10 keV,但CCD已设计为通过使用新颖的结构使软X射线性能最大化。由Loral Fairchild制造的CUBIC CCD尺寸为1024 $ MUL 1024像素,其中18 $ mu @ m $ MUL 18 $ mu @ m像素。 CCD使用了一种新型的“薄多晶硅”栅极结构,旨在最大程度地降低低能量子效率,同时仍保留了正面照明和三相设备的高电荷转移效率的优势。由于采用正面照明,该设计避免了背面照明设备的表面稳定性问题。第一批CCD和测试结构的制造已经完成,我们报告了宾夕法尼亚州CCD的实验室摄像机测试。!7

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