Influence of Nanostandard Properties on Calibration Procedures of SPMs

摘要

While SPMs are being developed and used in scientific research for already more than two decades now, the number of these instruments is rapidly growing in the field of industrial applications as well in recent years. Especially with the latter, an increasing demand emerges for the validation of the accuracy of these measurement instruments. This paper will therefore address various aspects of SPM calibration with the focus on relevant properties of calibration standards and illustrate some critical aspects of calibration routines that may easily lead to over- or underestimated calibration uncertainties. Extensive AFM investigations on nanostandards were performed and supported by measurements with a metrological SEM.