A new optical measuring method of edge profiles with tens-nanometre resolution for micro cutting tool is proposed. The edge profiles are scaled by the measurable width between the first two maxima in diffraction patterns, which relate to the width of a slit aperture formed between a reference knife-edge and a tool cutting-edge. The technique is applicable for on-machine measurement due to simplicity and long working distance of optical system. In this paper, first, the theoretical analysis reveals the measurement resolution. Next, scalability and practicability of the method are affirmed by the fundamental experiments. Finally, good agreement of profiles measured by developed experimental device with SIM image approved that the proposed method is capable to measure cutting-edge profiles with high accuracy.
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