Nanometric Positioning with Three Degrees of Freedom over a One-Millimeter Stroke Using Flexure Guide and Electromagnetic Linear Motor

摘要

The potential of a planer positioning mechanism with three degrees of freedom using a flexure guide and an electromagnetic linear motor is discussed experimentally. The goal is a multi-axis positioning system with nanometric resolution over a one-millimeter stroke. On the basis of previous results with a single axis prototype, an X-Y-θ stage is designed and constructed using a flexure guide mechanism and voice coil motor type linear actuators. The necessity of a driving method and control system to obtain high resolution for multi axis positioning is discussed. Some experiments are performed to evaluate performance: Fine positioning, with resolution of 2 nm for translation in XY and 0.01 asec for yaw in θ, is achieved over a 1 mm stroke, and thus the potential of the mechanism is demonstrated.