Experimental assessment of optical uncertainty components in the measurement of an optomechanical hole plate

摘要

An investigation on the effect of imaging parameters such as the direction of illumination and the magnification of the objective in the optical coordinate measurements is described in this paper. An optomechanical hole plate with 5x5 holes was measured using various configurations of illumination and two objectives with different magnification. An optical CMM equipped with a CCD camera was used for the investigation. The measurement results were compared with the mechanical calibration values of the 25 holes. It was found that illuminations with small angles of incidence may produce deviations up to approximately 6 microns. Furthermore, it was observed that the results are not significantly affected by the magnification of the objective.