Very High Tunable Inter-Digital Capacitor Embedded Fully into BZN Thin Film Dielectrics for Microwave Applications

摘要

In this paper, a tunable inter-digital capacitor (IDC) using the bismuth zinc niobate (BZN) pyrochlore thin film dielectrics is presented for microwave applications. In order to reduce the DC bias voltage and to increase the tunability of the IDC, its electrodes are fully embedded into the tunable BZN dielectrics. At 20 V DC applied, the IDC yields 75 % tunability at 5.8 GHz. This tunability is the highest at microwave frequencies, as far as authors know.