Technology For Production Of Nano-Materials By Fine Milling Of Used Ceramic Targets And Consolidation Of Powders In Conditions Of Intense Power Treatment

摘要

Technology for dispersion of the rests of ceramic targets to nano-disperse condition, mixing secondary powder with synthesized one, compaction and sintering for production of targets to be used for deposition of quality coatings has been developed. Composite material of the In_2O_3-SnO_2 composition has been used for investigation. Disintegration of cleaned targets was carried in 3 operations. Preliminary milling was carried out in a hydraulic press till 1-5 mm. Rough milling was carried out with the help of cone-inert miller to the particle size of 0.04-1.0 mm and final dispersion was carried out on a whirl miller to the particle size of 0.1-0.6 mkm. At the same time not less than 60% of particles were smaller than 0.3 mkm. Specific surface of the powder was within the range of 1.567-1.600 m~2/g. Analysis of chemical composition of the product showed that its purity and relation between indium and tin oxides during dispersion do not worsen comparing to the initial target. The samples has been compacted by static and dynamic methods with brisant blasting agents in the air according to the flat loading scheme. The samples has been sintered in an air 'Naber' furnace within the temperature range of 1500-1600℃ during 1-5 hours. Investigations showed that the samples produced by explosion compaction had density of 96.5-67% and crystallite sizes of 1-3 mkm and those samples produced according to the conventional technology had density of 83-87% and crystallite sizes of 5-10 mkm. Density of initial targets was 93-95%.