Characterization of Eximer Laser Beam Profiles

摘要

Due to their favourable high photon energies in combination with high pulse energies, excimer lasers have found increased applications in industry in recent years, which in many cases strongly rely on the stability and precise control over the spatial profile of the beam along its path from the laser source to the workpiece. Thus, accurate techniques for acquisition of energy density distributions and reliable standardized methods for evaluation of beam parameters are required, which differ in some aspects from the demands of other high power laser systems working in the IR spectral range. Within the EUREKA project CHOCLAB, a system for comprehensive bem diagnostics allowing both near- and far-field measurements was developed. Alogn with a description of this device, results on profile acquisition at high pulse repetition rates and evaluation of beam parameters for homogenized profiles are presented in this paper.