Micro Structuring of Ceramics and Steels with Solid-State Lasers

摘要

The economical potential of micro-systems has already been shown in application fields such as electronics, telecommunication, medicine and automatic control engineering. Historically, most of these systems were developed using silicon as base material. The shaping of this material is done by lithographic and etching processes. Both, the base material and the production techniques do impose restrictions on general applications of these systems. To get a further transfer of micro-systems into all technical fields, it is necessary to explore efficient economical production techniques for a manifold of materials. For this reason, the contribution will discuss laser micro-machining of ceramics and steel with q-switched and continuously operated solid-state lasers.