Broadband Antireflecting Conductive Metamaterial Films

摘要

A polarization-independent, broadband, antireflecting compound aperture array is designed, fabricated and characterized. The structure is composed of an aluminum film with a periodic array of perforations (apertures) configured in a square lattice with a unit cell consisting of two apertures with different diameters, both filled with silicon oxynitridc. Light-channeling waveguide cavity modes of different energies arc excited within the two different apertures within each unit cell thereby transmitting different parts of the solar spectrum into the substrate. Experimental characterization shows low reflection (<10%) and low diffuse backscattcr. Numerous applications of the films include light detecting and emitting structures and devices.