Soft x-ray output from the spherical pinch plasma radiation source (SPX II) for microlithography a

摘要

Abstract: Study of soft x-ray (0.8 - 10 keV) output from the SPX II, a spherical pinched plasma radiation source, is presented. The soft x-ray output increases with the discharge voltage. The output is also a function of the gases used and pressures. A simple analytic model was developed which can scale the imploding wave velocity with respect to the discharge voltage and the gas density. Experiments to measure the imploding wavefronts were carried out. The predictions of the model agree well with the measured results in a wide range of the parameter space. !4