GROWTH OF HOMOGENEOUS AND GRADIENT BC_xN_y FILMS BY PECVD USING TRIMETHYLAMINO BORANE COMPLEX

摘要

The homogeneous nanocrystalline BC_xN_y films were synthesized by PECVD at low pressure in the temperature range of 473-973 K using gaseous mixture of trimethylamino borane complex and/or ammonia, hydrogen, helium. We report on development and characterization of materials on the basis of the boron carbonitride with gradient of chemical composition or grain size. The as-grown films were characterized by the following methods: ellipsometry, IR- and Raman spectroscopies, XRD using synchrotron radiation, SEM and HREM.