Vertical Scanning Interferometry Based on White-light Interference Reconstructs MEMS Device Surface Profile

摘要

Vertical scanning interferometry based on white-light interference is a typical measurement method for the standard step microstructure. Contrasting with other algorithms, vertical scanning interferometry has higher resolution, faster operation speed and higher accuracy. In this paper, a series of interferograms with intensity information for standard step microstructures are obtained from Micro System Analyzer. The surface profile is reconstructed. The results of measurement coincide with the real step height of the standard device microstructures.