Adapting Texas Instruments (TI) DLP® technology to demonstrate a phase spatial light modulator

摘要

A prototype of a Phase Spatial Light Modulator (PLM) device has been developed and demonstrated using DLP®Micro-ElectroMechanical System (MEMS) based technology. Designed for a visible (405nm to 632nm) laser, thisdevice uses an array of individually-addressable, digitally-controlled PLM micromirrors that can be addressed tomultiple discrete vertical positions. The MEMS superstructure process flow used for DMD micromirrors was adapted toenable manufacturing this device on top of an existing DLP technology CMOS device. The prototype has demonstratedgood uniformity across the array and the ability to steer light using phase light modulation. A discussion of some initialperformance metrics as well as potential applications will be presented.