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New Metal Organic Gas Supply System by Using an Advanced Flow Control System

机译:使用先进的流量控制系统的新型金属有机气体供应系统

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Gas flow control is important factor that influences the concentration of process gas and the pressure of the process chamber. In manufacturing processes that use metal organic (MO) gases, a system that controls the flow rate of MO gas must be developed to improve film performance and the reliability of film formation. We have developed a high temperature flow control system based on pressure measurements (HT-FCS) to control the flow rate of MO gas. Moreover, a liquid source control system that combines a HT-FCS and vaporizer was developed. Using this system, it was possible to control the flow rate of MO gas with high accuracy for extended periods. A flow control system that can supply MO gas with a stable flow rate by vaporizing MO material with the quantity needed at each time has been realized.
机译:气流控制是影响工艺气体浓度和工艺腔室压力的重要因素。在使用金属有机(MO)气体的制造过程中,必须开发一种控制MO气体流速的系统,以改善膜性能和成膜可靠性。我们开发了基于压力测量(HT-FCS)的高温流量控制系统,以控制MO气体的流量。此外,开发了结合了HT-FCS和蒸发器的液体源控制系统。使用该系统,可以长时间高精度地控制MO气体的流量。已经实现了一种流量控制系统,该系统可以通过以每次所需的量蒸发MO材料来以稳定的流量提供MO气体。

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