Optimal Segmentation of Polygon Edges

摘要

In optical proximity correction, edges of polygons are segmented, and segments are independently moved to meet line-width or edge placement goals. The purpose of segmenting edges is to increase the degrees of freedom in proximity correction. Segmentation is usually performed according to predetermined, geometrical rules. Heuristic, model-based segmentation algorithms have been presented in the literature. We show that there is an optimal and unique way of segmenting polygon edges.