C-H complex in Si observed at low temperatures

摘要

Local vibrational modes of a carbon-hydrogen complex have been identified with infrared absorption spectroscopy. After implantation of protons or deuterons at approx 20 K a carbon mode at 596 cm~-1 and a hydrogen mode at 1884 cm~-1 are observed in the sample annealed at 180 K. The two modes originate from the same defect, which is tentatively identified as bond centred hydrogen in the vicinity of a nearby substitutional carbon atom. direct c 1999 Elsevier Science S.A. All rights reserved.