Efficient materials processing by dual action of XUV/Vis-NIR ultrashort laser pulses

摘要

We demonstrate a novel experimental method for efficient structural surface modification of various solids (PMMA, amorphous carbon) achieved by simultaneous action of XUV (21.6 nm), obtained from High-order Harmonic Generation (HHG), and Vis-NIR (410/820 nm) laser pulses. Although the fluence of each individual pulse was far below the surface ablation threshold, very efficient and specific material modification was observed after irradiation even by a single shot of mixed XUV/Vis-NIR radiation.