Abstract: The Center for Optics Manufacturing (COM) Process Science development program has advanced the current state of the art in optics manufacturing. Initial data indicates that the newly developed deterministic microgrinding process will generate specular optical surfaces. Deterministic microground surfaces, with 100 - 300 angstroms surface finishes, 1 - 2 microns of subsurface damage, and 1 wave peak-to-valley surface figure, have been produced on a range of glass types. Total cycle time, using a modified machine, took an average of five minutes per surface from start to finish. The high speeds, slow infeed rates, precision spindle, and computer control that were required to produce these microground surfaces could not have been achieved on current conventional equipment, thus emphasizing the importance of the Center's Process Science program.!0
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