Process of ion-beam surface layer formation

摘要

In the paper some regularities of metal surface ion-beam modification are studied theoretically. The model of ion-beam layer formation was developed on the basis of assumption about diffusion of radiation-induced defects from the surface layer that has some volume-averaged defect concentration.. A dependence of this volume-averaged defect concentration from ion flow parameters and treated material characteristics was developed. It was shown that defect distribution function: (important characteristics determining the surface layer properties) could be calculated using the presented model.