首页> 外文会议>Conference on Surface Scattering and Diffraction for Advanced Metrology, Aug 1, 2001, San Diego, USA >Measuring correlation between speckle patterns reflected from rough surfaces at different wavelengths by adaptive photo-EMF detector
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Measuring correlation between speckle patterns reflected from rough surfaces at different wavelengths by adaptive photo-EMF detector

机译:通过自适应光电动势检测器测量从不同波长的粗糙表面反射的斑点图案之间的相关性

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摘要

Adaptive photodetectors, based on non-steady-state photo-EMF, are suitable both for detection of fast phase modulation in one of the beams forming regular interference fringes and of fast transverse displacement of speckle patterns in a reference-less configuration. In particular, they were used for detection of lateral displacements of rough surfaces, including those induced by nanosecond laser pulses (laser ultrasonic). In combination with light sources of low temporal coherence (i.e. superluminiscent diodes) these detectors can be used for micron resolution profilometry of rough surfaces. In this paper we propose and demonstrate utilization of strong (quadratic) dependence of the photo-EMF signal on contrast of the detected light pattern for simple and fast evaluation of a correlation degree between speckle patterns reflected from the same rough surface at different wavelengths. Experimental results obtained with the GaAs photo-EMF detector and two different lines of a cw Ar-ion laser for transmittance and reflectance configuration (with ground glass and metal plates used as light scattering objects) are presented.
机译:基于非稳态光电动势的自适应光电检测器既适用于检测形成规则干涉条纹的光束之一中的快速相位调制,又适用于无参考配置中斑点图案的快速横向位移。特别是,它们用于检测粗糙表面的横向位移,包括纳秒级激光脉冲(激光超声)引起的横向位移。结合低时间相干性光源(即超发光二极管),这些检测器可用于粗糙表面的微米分辨率轮廓测量。在本文中,我们提出并证明了对光电动势信号的强(二次)依赖性对检测到的光图案的对比度的利用,可以简单,快速地评估同一粗糙表面在不同波长下反射的斑点图案之间的相关程度。给出了用GaAs光电EMF检测器和连续的Ar离子激光器的两条不同的线进行透射和反射配置(使用磨砂玻璃和金属板作为光散射对象)获得的实验结果。

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