Gas Analytical and Optical Measurements in Inductively Coupled Electrodeless RF Discharge Lamps

摘要

Thanks to the low cost high speed semiconductor switching devices several ICP (Inductively Coupled Plasma) electrodeless lamps appeared during the last decade. The geometry of the ICP lamps is more free than that of conventional CFLs (Compact Fluorescent Lamp), so approximations used for CFL design can't be applied. An experimental setup has been built to investigate effects of the key parameters relevant to the lamp operation. The ion energy distribution in the vicinity of the wall has been measured, and it is important input of any computer model that is aimed to simulate ICP discharges.