首页> 外文会议>Conference on Semiconductor Photodetectors; 20040128-20040129; San Jose,CA; US >Optical beam induced current microscopy at DC and Radio Frequency
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Optical beam induced current microscopy at DC and Radio Frequency

机译:直流和射频光束感应电流显微镜

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摘要

In this paper we introduce the concept and technique of optical beam induced current (OBIC) generation at radio frequencies. The method is combined with lateral raster scanning of a tightly focused spot so as to generate a mapping of high spatial resolution. We demonstrate experimentally that if a mode-locked laser is used to excite the sample then the frequency transfer function of the optically active device is readily obtained with at least 1 μm spatial resolution, in real time. In addition, with the help of an appropriate electronic arrangement, we demonstrate how to obtain pseudo-colored OBIC images of the sample.
机译:在本文中,我们介绍了在射频下产生光束感应电流(OBIC)的概念和技术。该方法与紧密聚焦点的横向光栅扫描相结合,以生成高空间分辨率的映射。我们通过实验证明,如果使用锁模激光器激发样品,则可以至少实时地以至少1μm的空间分辨率轻松获得光学有源设备的频率传递函数。此外,借助适当的电子装置,我们演示了如何获取样品的伪彩色OBIC图像。

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