Fast Extraction of Static Electric Parameters with Accuracy Control

摘要

The paper presents an efficient numerical method to extract accurate R, L, C parameters of passive on-chip structures. This method is based on two main original ideas. First, the accuracy is controlled by using two complementary approaches based on scalar and vector potential, which provide lower and upper bounds for the extracted parameter. The convergence is accelerated by using the Richardson extrapolation of the average value of the two complementary bounds. Second, the field equations are solved by multigrid finite element method with local adaptive mesh subgriding. The refining process is stopped as soon as the desired accuracy is reached.