首页> 外文会议>Conference on Optical Metrology in Production Engineering; 20040427-20040430; Strasbourg; FR >Design aspects in the development of a standing-wave interferometer
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Design aspects in the development of a standing-wave interferometer

机译:驻波干涉仪开发中的设计方面

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A novel interferometer based on sampling the maxima and minima of intensity of an optical standing wave has been developed. The photoelectric detection of the standing wave is performed by using a partially transparent thin-film photodiode. The automatic bidirectional fringe counting is provided by a partially transparent and phase-sensitive detector which is realized by the integration of two stacked transparent photodiodes along the optical axis of the standing wave. To obtain the ideal sine and cosine signals, the transparent phase-sensitive detector has to be optimized by adjusting the thickness of the single layers. Some features of optimization will be presented and explained. Length measurements have been demonstrated by displacing the plane mirror and bidirectional fringe counting within the standing wave.
机译:已经开发了一种基于对光学驻波的强度的最大值和最小值进行采样的新型干涉仪。通过使用部分透明的薄膜光电二极管执行驻波的光电检测。自动双向条纹计数由部分透明且对相位敏感的检测器提供,该检测器通过沿驻波光轴集成两个堆叠的透明光电二极管来实现。为了获得理想的正弦和余弦信号,必须通过调整单层的厚度来优化透明相敏检测器。将介绍和说明一些优化功能。通过移动平面镜和驻波内的双向条纹计数已证明了长度测量。

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