首页> 外文会议>Conference on Optical Metrology in Production Engineering; 20040427-20040430; Strasbourg; FR >Digital Holography and Grating Interferometry: A complementary Approach
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Digital Holography and Grating Interferometry: A complementary Approach

机译:数字全息术和光栅干涉术:一种补充方法

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In this work we propose to extend the Grating Interferometry scheme by Digital Holography. The main advantages of this complementary approach are that no imaging lens is needed and that the reconstruction is not limited to the image plane as it is using a lens. Additionally, this technique provides sensitivity to both directions, normal and parallel to the surface under test. Because the grating is directly integrated into the surface, this allows measuring the displacement of that surface under long term conditions within the magnitude of the used wavelength. Good qualitative results are obtained using a single illumination direction. Quantitative results are obtained using multiple illumination directions and the in-plane sensitivity of the presented technique is shown to be equivalent to that of the Grating Interferometry.
机译:在这项工作中,我们建议通过数字全息术扩展光栅干涉仪方案。这种互补方法的主要优点是不需要成像镜头,并且重建过程不限于像平面,就像使用镜头一样。此外,该技术还提供了对法线和平行于被测表面的两个方向的灵敏度。由于光栅直接集成到表面中,因此可以在所用波长范围内的长期条件下测量该表面的位移。使用单个照明方向可获得良好的定性结果。使用多个照明方向可以获得定量结果,并且所显示技术的面内灵敏度与光栅干涉仪相当。

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