Multiwavelength monitoring of thin film growth using a fibre spectrometer

摘要

We report here on a novel optical thin film monitoring technique. The instrument has been developed to improve the spectral performance of multilayer stacks by monitoring the instantaneous spectral performance over a wide wavelength band. Use is made of two commercially available miniature fibre spectrometers to cover the band 200 nm to 1 umm. A special software program has been written to read in the data from dual spectrometers and display the data to the monitor.