Design and fabrication of a MEMS mirror for Miniature Laser Projection

摘要

For miniature laser projection displays the laser beam is swept very fast back and forth with a MEMS mirror. This paper presents an innovative design for such a MEMS mirror. Both the dynamical behavior and manufacturability have been improved. We designed a process based upon industrially proven process steps to accurately control critical parameters and fabricated a mirror consisting of: cantilever beams, out-of-plane support beams and a rhombus shaped enforcement structure. Measurements show a well defined resonant mode of operation at 23.5 kHz while suffering from only little parasitic resonance modes. This mirror can now be mass-produced at low costs.