Process design environment for microfabrication technologies

摘要

Microfabrication technologies require adequate design methodologies since there is a strong interaction between the shape or the layout of microstructures and their fabrication process sequence. Both areas are subject of design. This paper gives an overview over the different design methodologies in design of microstructures focusing on fabrication process design. To derive the novel design models, the different approaches in digital, analog, mixed-signal, and MEMS design are described. The second part of the paper addresses the state of the art in process flow design tools. Eventually a new software environment based on the design models is presented that is based on current software technologies and platform independent programming.