MICROFABRICATION PROCESSING AGENT AND MICROFABRICATION PROCESSING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a microfabrication processing agent capable of microfabricating a silicon oxide film selectively when microfabricating a multilayer film laminating at least a silicon oxide film and a silicon nitride film, and to provide a microfabrication processing method using the same.;SOLUTION: The microfabrication processing agent contains (a) at least any one kind of 0.01-15 wt% of hydrogen fluoride, or 0.1-40 wt% of ammonium fluoride, (b) water, and (C) at least one kind of water soluble polymer selected from a group consisting of 0.001-10 wt% of styrene sulfonic acid, styrene sulfonic acid ammonium, and styrene sulfonic acid ester. When a multilayer film laminating at least a silicon oxide film and a silicon nitride film is microfabricated, the silicon oxide film is microfabricated selectively.;COPYRIGHT: (C)2013,JPO&INPIT