Photonic crystal waveguides in InP-based heterostructures

摘要

Photonic crystal waveguides in InP-based heterostmctures are studied experimentally and theoretically. The waveguides are fabricated in an InP/GalnAsP/InP low index contrast heterostructure using Ar/Cl_2 Chemical Assisted Ion Beam Etching, and characterized using the end-fire method. The obtained experimental near-infrared transmission spectra are further analyzed by comparing with theoretical results calculated by the finite-difference time-domain method. A loss of 1 dB/100 μm in the photonic crystal waveguides is demonstrated. The mini-stop bands, positioned in agreement with our theory, are observed. In-plane cavities with photonic crystal boundaries inside the waveguide are also realized. A quality factor of 400 for a 6 μm long cavity is obtained.