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Fabrication and optical properties of organic crystal waveguide

机译:有机晶体波导的制备和光学性质

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摘要

A ridge waveguide of an organic salt, 4-N, N-dimethylamino-4'-N-methyl-stilbazorium tosylate, DAST, which has the largest second-order optical nonlinearities among organic materials, was fabricated for the first time to our knowledge. DAST crystal was covered by poly (methyl methacrylate) as a protect layer for a photo-resist solution, then standard photlithography and oxygen reactive ion etching (RIE) processes were applied. DAST ridge waveguide, 34x20 umm and 6x6 umm channel s with 2mm in length were successfully fabricated by this process. To reduce the refractive index of the crystal, photo bleaching was effectively applied for DAST crystla. So. Photobleaching can be applied to fabricate a cladding layer for the ridge waveguide.
机译:据我们所知,首次制造了有机盐4-N,N-二甲基氨基-4'-N-甲基-苯乙烯基甲苯磺酸甲苯酯的脊形波导,它在有机材料中具有最大的二阶光学非线性。 。 DAST晶体被聚(甲基丙烯酸甲酯)覆盖,作为光刻胶溶液的保护层,然后应用标准光刻和氧反应离子刻蚀(RIE)工艺。通过该工艺成功制造了长度为2mm的DAST脊形波导,34x20 umm和6x6 umm通道s。为了降低晶体的折射率,将光漂白有效地应用于DAST crystla。所以。可以应用光漂白来制造脊形波导的覆层。

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