On the fabrication of NiTi shape memory alloy micro devices using laser

摘要

NiTi shape memory alloy thin film has been proved to be the best micro actuation mechanism due to the largest displacement and the highest actuation force as compared with other mechanisms. The combination of laser and traditional MEMS techniques might provide a better and cheaper solution for the fabrication of micro devices. In this paper, we present some preliminary results of cutting and annealing of NiTi shape memory alloy thin films using different types of lasers.