Laser systems for generation of x-ray radiation

摘要

Laser-produced plasma is an efficient source of x-ray radiation and has been widely used in science and technology. As a result of rapid development of x-ray optics during the last decades a significant increase in x-ray applications has been observed. In the paper we described conditions of efficient generation of x-ray radiation from laser-produced plasma. These conditions determien characteristics of laser radiation to be used for plasma creation. We have discussed parameters of laser systems used for x-ray generation with respect to applications in lithography and microscopy. We have presented selected laser systems, which ahve been used for generation of non-coherent and coherent x-ray radiation.