Femtosecond laser induced refractive index modifications for fabrication of three-dimensional integrated optical devices

摘要

We present the fabrication of three-dimensional waveguide structures indide fused silica using the femtosecond laser direct-writing technique. The guiding properties of a produced 1x3 splitter are studied in detail. By appropriate choice of the processing parameters a multimode entrance port can be generated which allows to vary the splitting ratio by changing the input coupling. The processing requirements for such splitter devices will be discussed.