Effective error reduction method in phase-shifting interferometer

摘要

In phase-shifting interferometer, software processing method is a very important means to achieve high accuracy. By analyzing and simulating, it is indicated that only removing the effect of the error which has a spatial frequency of twice the fringe frequency in the result is not enough, especially in high accouracvy measuring. The paper presents an averaging method to reduce the effect of errors. Testing results testify this averaging method is effective and robust.