Optical characterization of 1GHz silicon based optical modulator

摘要

In this paper the optical characterization of a novel, metal-oxide-silicon (MOS) capacitor-based, high speed, silicon optical modulator is presented. By using a capacitor based rather than the conventional p-i-n junction based architecture to modulate the free carrier density inside the waveguide, we show the realization of a fast, 2.5-GHz, optical modulator.