Infrared Thermal Imaging of SiN_x membranes

摘要

In this paper we present preliminary experimental results of static thermal mapping for the characterization of thermal properties of single or multi-layer thin film membranes. Based on direct radiometric measurement, the proposed system is able to acquire, with high spatial (less than 10μm) and quite good temperature (less than 0.1℃) resolution, the temperature maps. The results, reported here, confirm its capability. We tested a low stress LPCVD SiN membrane heated by means of a LPCVD polysilicon (PS) resistor. The experimental results obtained are in qualitative agreement with theoretical previsions.