Microelectromechanical spatial light modulators with integrated electronics

摘要

This paper describes design and development of a microelectromechanical, micromachined spatial light modulator (μSLM) integrated with complementary metal-oxide semiconductor (CMOS) electronics, for control of optical phase in phase-only optical correlators. The μSLM will consist of a large array of piston-motion MEMS mirror segments (pixels) each of which capable of altering the phase of reflected light by up to one wavelength for infrared (1.5 μm) illumination. Results of a proof-of-concept study are presented along with an electromechanical model and details of the fabrication process for the μSLM