New Perfluoroelastomers for Semi-Conductor Applications

摘要

Perfluoroelastomers are designed for high demanding applications. In order to fulfill the new needs of high performances requested by the market, new technologies able to produce tailor-made perfluoroelastomers should be developed. In the present paper a new perfluoroelastomer Tecnoflon~R PFR 5910M filled with a special semi-crystalline perfluoropolymer filler is presented. Usually, the polymeric filler is polytetrafluoroethylene (PTFE). This compound is obtained either by a special core-shell polymerization or by co-coagulation of the perfluoroelastomer latex and a PTFE latex with polymer particles below 100 nm. This new technology, developed by Ausimont, allows the preparation of translucent PTFE based perfluoroelastomer items with good final properties for wet and dry semiconductor application. Furthermore in order to increase the thermal resistance of the polymer network a new curing agent, namely a fluorinated di-olefin, is used in the curing of the new PTFE-filled perfluoroelastomer.