Optical Coherence Microscopy for Nondestructive 3D Imaging of Femtosecond Laser Written Structures

摘要

Optical coherence microscopy (OCM) is used to image femtosecond laser direct written buried structures created within transparent media. Volumetric structures of optical damage and laser-induced refractive index change were produced in fused silica and borosilicate glass, respectively. Noninvasive 3D imaging of the structures was successfully demonstrated by a custom built OCM. High signal to noise ratio was obtained since the optical glasses have high transparency at the probe wavelength centered at 800 nm.