An experimentla study has been carried out using a Miniature Quadrupole Mass Spectrometer (MicroQuad) for gas analysis. Conventional quadrupolr rods have bene replaced with a micromachined mass filter made from silicon with Au metallised specially drawn glass fibres of length 30 mm and diameter 0.5 mm. A standard hot filament ion source and both Faraday detection and a channel electron multiplier have bene used. the effect of ion focus voltage has also been modelled by SIMION simulatio. COnventional electronics were adapted to run at 6 to 8MHz and mass spectra in the range 0-50 a.m.u. The results indicate a good valley separation between O, OH, H_2O and Ar~2+ and a best resolution at 10
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