Research on super-smooth processing technology of optical elements

摘要

The newest achievement of super smooth processing technology of optical element bowl-feed polishing (BFP) is described. The need background and developing tendency of super-smooth optical elements are analyzed. The key problems of BFP have been found, the process parameters have been determined, and the basic method of BFP has been worked out by the study of process factors and processing principle. PHI 50mm k9 glass sample with 0.5nm surface roughness and better than lambda/8 surface shape has been processed.