Research on Processing Technique for Interference Pattern with Step Using Phase-shift interferometry

摘要

Based on introducing the principle and method of processing technique for interference pattern with step using the characteristic of phase-shift interferometry. The paper has discussed a new phase-unwrapping algorithm for the phase map containing discontinuities. The correct phase values in the presence of discontinuities, especially those caused by the object with height steps, can be obtaiend. This algorithm is fast and accurate. The results of the measurement of three-dimensional object with height steps are presented. These techniques have been successfully applied to measure the surface and wave aberration of the system with step.