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XPS,RBS,XRD and SEM studies of the oxygen sensitive,nanosized TiO_2 thin films prepared by sol-gel process

机译:溶胶-凝胶法制备的氧敏感纳米TiO_2薄膜的XPS,RBS,XRD和SEM研究

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摘要

Pure and doped nanosized titanium dioxide (TiO_2) thin films were prepared using sol-gel process.the chemical compositon fo the films was analyzed by X-ray Photoelectron Spectroscopy (XPS) and Rutherford Back-scattering Spectroscopy (RBS).The XPS and RBS results indicated that the films are stoichiometric with carbon as the dominant impurity on the surface.
机译:采用溶胶-凝胶法制备了纯的和掺杂的纳米二氧化钛(TiO_2)薄膜,并通过X射线光电子能谱(XPS)和卢瑟福背散射光谱(RBS)分析了薄膜的化学成分.XPS和RBS结果表明,该膜是化学计量的,表面碳是主要杂质。

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