Design, fabrication, and impedance of plasma wave detectors

摘要

We present the design, fabrication, and impedance measurements of plasma wave detectors fabricated from GaAs/AlGaAs heterostructures. The design principles will allow broadband (dc to 7 GHz) measurements of the device power coupling and responsivity as a detector, which is a "scale model" of a THz plasma wave detector. We demonstrate clear resonance behavior in the impedance spectrum.