Infrared micro-thermography of an actively heatedpreconcetrator device

摘要

We report infrared micro-thermography measurements and analysis of static and transient temperature maps of an actively heated micro-fabricated preconcentrator device that incorporates a dual serpentine platinum heater trace deposited on a perforated polyimide membrane and suspended over a silicon frame. The sorbent coated perforated membrane is used to collect vapors and gases that flow through the preconcentrator. After heating, a concentrated pulse of analyte is released into the detector. Due to its small thermal mass, precise thermal management of the preconcentrator is critical to its performance. The sizes of features, the semi-transparent membrane, the need to flow air through the device, and changes in surface emissivity on a micron scale present many challenges for traditional infrared micro-thermography. We report an improved experimental test-bed. The hardware incorporates a custom-designed miniature calibration oven which, in conjunction with spatial filtering and a simple calibration algorithm, allows accurate temperature maps to be obtained. The test-bed incorporates a micro-bolometer array as the infrared imager. Instrumentation design, calibration and image processing algorithms are discussed and analyzed. The procedure does not require prior knowledge of the emissivity. We show that relatively inexpensive uncooled bolometers arrays can be used in certain radiometric applications. Heating profiles were examined with both uniform and non-uniform air flow through the device. The conclusions from this study provide critical information for optimal integration of the preconcentrator within a detection system, and in the design of the heater trace layout to achieve a more even temperature distribution across the device.