DESIGN AND MODELING APPROACH FOR A LIFTING AND ACTUATING UNIT FOR THE APPLICATION IN NANO-PRECISION MACHINES

摘要

Micro and nano systems play an important role in todays society. But the production facilities for the next generation of such systems become increasingly complex and expensive. New fabrication methods need to be developed to further improve and miniaturize these systems and to make the production accessible to new markets. One key device in the fabrication process is the nano positioning machine (NPM), which moves either the tool or the sample. Furthermore large travel ranges are needed i.e. to structure large wafers or optical parts. Thereby, the vertical motion is a big challenge since it needs to permanently counteract against the gravitational force. The vertical drive system needs to be designed in a way that it induces a minimum amount of heat into the system to avoid any thermal expansion.