PRIMARY RESONANCE OF MEMS/NEMS CIRCULAR PLATE BIOSENSORS

摘要

This investigation deals with M/NEMS circular plates under electrostatic actuation. Such structures can be used as resonator sensors for medicine and biology applications such as virus, bacteria or DNA detection. The system consists of a clamped circular plate over a ground. The actuation of the plate is done through an AC voltage whose frequency is near half natural frequency of the plate. This produces a primary resonance to be used afterwards for sensing purposes. It is showed that a saddle-node bifurcation occurs. The effects of damping, voltage, Casimir, and van der Waals forces are predicted.