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TIME RESPONSE DYNAMICS OF LINEAR MODEL OF MICROCANTILEVER-MEMS

机译:微悬臂梁MEMS线性模型的时间响应动力学

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This paper presents analytic derivation of dynamic behavior of a liniearized micro-electro-mechanical resonator. The parametric oscillation results from a displacement-dependent electrostatic force generated by oscillation of a microbeam. The utilized device is a MEMS with a time-varying capacitor. The stability and steady state dynamic behavior of the MEMS has been analyzed without polarization voltage. The main characteristic of the no-polarization model is effects of parameters in stability of the system. A set of stability charts is provided for prediction of the boundary between the stable and unstable domains for the principal resonance. Applying perturbation method, analytical equations are derived to describe both the steady state and time response of the system.
机译:本文介绍了线性化微机电谐振器的动态行为的解析推导。参数振荡是由微束振荡产生的与位移有关的静电力产生的。使用的设备是具有时变电容器的MEMS。在没有极化电压的情况下,已经分析了MEMS的稳定性和稳态动态行为。无极化模型的主要特征是参数对系统稳定性的影响。提供了一组稳定性图,用于预测主共振的稳定域和不稳定域之间的边界。应用摄动法,推导了解析方程来描述系统的稳态和时间响应。

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